3/20/2012	12:13:09 AM	Helium valve closed
3/20/2012	12:13:09 AM	H2 valve closed
3/20/2012	12:13:09 AM	BCl3 valve closed
3/20/2012	12:13:09 AM	PH3 valve closed
3/20/2012	12:13:09 AM	SiCl4 pre valve closed
3/20/2012	12:13:09 AM	SiCl4 post valve closed
3/20/2012	12:13:09 AM	Main Vac valve closed
3/20/2012	12:13:09 AM	Bypass valve closed
3/20/2012	12:13:09 AM	Bubbler valve closed
3/20/2012	12:13:09 AM	Helium MFC set to  0.000000
3/20/2012	12:13:09 AM	H2 MFC set to  0.000000
3/20/2012	12:13:09 AM	BCl3 MFC set to  0.000000
3/20/2012	12:13:09 AM	PH3 MFC set to  0.000000
3/20/2012	12:13:09 AM	SiCl4 MFC set to  0.000000
3/20/2012	12:13:09 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	12:13:10 AM	Tube furnace set to 0
3/20/2012	12:13:13 AM	Helium valve closed
3/20/2012	12:13:13 AM	BCl3 valve closed
3/20/2012	12:13:13 AM	PH3 valve closed
3/20/2012	12:13:13 AM	SiCl4 pre valve closed
3/20/2012	12:13:13 AM	SiCl4 post valve closed
3/20/2012	12:13:13 AM	Main Vac valve closed
3/20/2012	12:13:13 AM	Bypass valve closed
3/20/2012	12:13:13 AM	Bubbler valve closed
3/20/2012	12:13:13 AM	H2 valve opened
3/20/2012	12:13:13 AM	Helium MFC set to  0.000000
3/20/2012	12:13:13 AM	H2 MFC set to  500.000000
3/20/2012	12:13:13 AM	BCl3 MFC set to  0.000000
3/20/2012	12:13:13 AM	PH3 MFC set to  0.000000
3/20/2012	12:13:13 AM	SiCl4 MFC set to  0.000000
3/20/2012	12:13:13 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	12:13:13 AM	Tube furnace set to 0
3/20/2012	12:14:20 AM	Helium valve closed
3/20/2012	12:14:20 AM	BCl3 valve closed
3/20/2012	12:14:20 AM	PH3 valve closed
3/20/2012	12:14:20 AM	SiCl4 pre valve closed
3/20/2012	12:14:20 AM	SiCl4 post valve closed
3/20/2012	12:14:20 AM	Main Vac valve closed
3/20/2012	12:14:20 AM	Bypass valve closed
3/20/2012	12:14:20 AM	H2 valve opened
3/20/2012	12:14:20 AM	Bubbler valve opened
3/20/2012	12:14:20 AM	Helium MFC set to  0.000000
3/20/2012	12:14:20 AM	H2 MFC set to  500.000000
3/20/2012	12:14:20 AM	BCl3 MFC set to  0.000000
3/20/2012	12:14:20 AM	PH3 MFC set to  0.000000
3/20/2012	12:14:20 AM	SiCl4 MFC set to  0.000000
3/20/2012	12:14:20 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	12:14:20 AM	Tube furnace set to 0
3/20/2012	12:14:21 AM	Helium valve closed
3/20/2012	12:14:21 AM	BCl3 valve closed
3/20/2012	12:14:21 AM	PH3 valve closed
3/20/2012	12:14:21 AM	SiCl4 pre valve closed
3/20/2012	12:14:21 AM	SiCl4 post valve closed
3/20/2012	12:14:21 AM	Main Vac valve closed
3/20/2012	12:14:21 AM	Bypass valve closed
3/20/2012	12:14:21 AM	H2 valve opened
3/20/2012	12:14:21 AM	Bubbler valve opened
3/20/2012	12:14:21 AM	Helium MFC set to  0.000000
3/20/2012	12:14:21 AM	H2 MFC set to  500.000000
3/20/2012	12:14:21 AM	BCl3 MFC set to  0.000000
3/20/2012	12:14:21 AM	PH3 MFC set to  0.000000
3/20/2012	12:14:21 AM	SiCl4 MFC set to  0.000000
3/20/2012	12:14:21 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	12:14:21 AM	Tube furnace set to 1000
3/20/2012	12:39:21 AM	Helium valve closed
3/20/2012	12:39:21 AM	PH3 valve closed
3/20/2012	12:39:21 AM	Main Vac valve closed
3/20/2012	12:39:21 AM	Bypass valve closed
3/20/2012	12:39:21 AM	H2 valve opened
3/20/2012	12:39:21 AM	BCl3 valve opened
3/20/2012	12:39:21 AM	SiCl4 pre valve opened
3/20/2012	12:39:21 AM	SiCl4 post valve opened
3/20/2012	12:39:21 AM	Bubbler valve opened
3/20/2012	12:39:21 AM	Helium MFC set to  0.000000
3/20/2012	12:39:21 AM	H2 MFC set to  450.000000
3/20/2012	12:39:21 AM	BCl3 MFC set to  1.500000
3/20/2012	12:39:21 AM	PH3 MFC set to  0.000000
3/20/2012	12:39:21 AM	SiCl4 MFC set to  50.000000
3/20/2012	12:39:21 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	12:39:21 AM	Tube furnace set to 1000
3/20/2012	1:09:21 AM	Helium valve closed
3/20/2012	1:09:21 AM	BCl3 valve closed
3/20/2012	1:09:21 AM	PH3 valve closed
3/20/2012	1:09:21 AM	SiCl4 pre valve closed
3/20/2012	1:09:21 AM	SiCl4 post valve closed
3/20/2012	1:09:21 AM	Main Vac valve closed
3/20/2012	1:09:21 AM	Bypass valve closed
3/20/2012	1:09:21 AM	H2 valve opened
3/20/2012	1:09:21 AM	Bubbler valve opened
3/20/2012	1:09:21 AM	Helium MFC set to  0.000000
3/20/2012	1:09:21 AM	H2 MFC set to  500.000000
3/20/2012	1:09:21 AM	BCl3 MFC set to  0.000000
3/20/2012	1:09:21 AM	PH3 MFC set to  0.000000
3/20/2012	1:09:21 AM	SiCl4 MFC set to  0.000000
3/20/2012	1:09:21 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	1:09:21 AM	Tube furnace set to 750
3/20/2012	1:24:21 AM	H2 valve closed
3/20/2012	1:24:21 AM	BCl3 valve closed
3/20/2012	1:24:21 AM	PH3 valve closed
3/20/2012	1:24:21 AM	SiCl4 pre valve closed
3/20/2012	1:24:21 AM	SiCl4 post valve closed
3/20/2012	1:24:21 AM	Main Vac valve closed
3/20/2012	1:24:21 AM	Bypass valve closed
3/20/2012	1:24:21 AM	Helium valve opened
3/20/2012	1:24:21 AM	Bubbler valve opened
3/20/2012	1:24:21 AM	Helium MFC set to  500.000000
3/20/2012	1:24:21 AM	H2 MFC set to  0.000000
3/20/2012	1:24:21 AM	BCl3 MFC set to  0.000000
3/20/2012	1:24:22 AM	PH3 MFC set to  0.000000
3/20/2012	1:24:22 AM	SiCl4 MFC set to  0.000000
3/20/2012	1:24:22 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	1:24:22 AM	Tube furnace set to 0
3/20/2012	1:44:22 AM	Helium valve closed
3/20/2012	1:44:22 AM	H2 valve closed
3/20/2012	1:44:22 AM	BCl3 valve closed
3/20/2012	1:44:22 AM	PH3 valve closed
3/20/2012	1:44:22 AM	SiCl4 pre valve closed
3/20/2012	1:44:22 AM	SiCl4 post valve closed
3/20/2012	1:44:22 AM	Main Vac valve closed
3/20/2012	1:44:22 AM	Bypass valve closed
3/20/2012	1:44:22 AM	Bubbler valve closed
3/20/2012	1:44:22 AM	Helium MFC set to  0.000000
3/20/2012	1:44:22 AM	H2 MFC set to  0.000000
3/20/2012	1:44:22 AM	BCl3 MFC set to  0.000000
3/20/2012	1:44:22 AM	PH3 MFC set to  0.000000
3/20/2012	1:44:22 AM	SiCl4 MFC set to  0.000000
3/20/2012	1:44:22 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	1:44:22 AM	Tube furnace set to 0
3/20/2012	2:04:22 AM	Helium valve closed
3/20/2012	2:04:22 AM	H2 valve closed
3/20/2012	2:04:22 AM	BCl3 valve closed
3/20/2012	2:04:22 AM	PH3 valve closed
3/20/2012	2:04:22 AM	SiCl4 pre valve closed
3/20/2012	2:04:22 AM	SiCl4 post valve closed
3/20/2012	2:04:22 AM	Main Vac valve closed
3/20/2012	2:04:22 AM	Bubbler valve closed
3/20/2012	2:04:22 AM	Bypass valve opened
3/20/2012	2:04:22 AM	Helium MFC set to  0.000000
3/20/2012	2:04:22 AM	H2 MFC set to  0.000000
3/20/2012	2:04:22 AM	BCl3 MFC set to  0.000000
3/20/2012	2:04:22 AM	PH3 MFC set to  0.000000
3/20/2012	2:04:22 AM	SiCl4 MFC set to  0.000000
3/20/2012	2:04:22 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	2:04:22 AM	Tube furnace set to 0
3/20/2012	2:05:08 AM	Helium valve closed
3/20/2012	2:05:08 AM	H2 valve closed
3/20/2012	2:05:08 AM	BCl3 valve closed
3/20/2012	2:05:08 AM	PH3 valve closed
3/20/2012	2:05:08 AM	SiCl4 pre valve closed
3/20/2012	2:05:08 AM	SiCl4 post valve closed
3/20/2012	2:05:08 AM	Main Vac valve closed
3/20/2012	2:05:08 AM	Bubbler valve closed
3/20/2012	2:05:08 AM	Bypass valve opened
3/20/2012	2:05:08 AM	Helium MFC set to  0.000000
3/20/2012	2:05:08 AM	H2 MFC set to  0.000000
3/20/2012	2:05:08 AM	BCl3 MFC set to  0.000000
3/20/2012	2:05:08 AM	PH3 MFC set to  0.000000
3/20/2012	2:05:08 AM	SiCl4 MFC set to  0.000000
3/20/2012	2:05:08 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	2:05:08 AM	Tube furnace set to 0
3/20/2012	2:06:08 AM	Helium valve closed
3/20/2012	2:06:08 AM	H2 valve closed
3/20/2012	2:06:08 AM	BCl3 valve closed
3/20/2012	2:06:08 AM	PH3 valve closed
3/20/2012	2:06:08 AM	SiCl4 pre valve closed
3/20/2012	2:06:08 AM	SiCl4 post valve closed
3/20/2012	2:06:08 AM	Bypass valve closed
3/20/2012	2:06:08 AM	Bubbler valve closed
3/20/2012	2:06:08 AM	Main Vac valve opened
3/20/2012	2:06:08 AM	Helium MFC set to  0.000000
3/20/2012	2:06:08 AM	H2 MFC set to  0.000000
3/20/2012	2:06:08 AM	BCl3 MFC set to  0.000000
3/20/2012	2:06:08 AM	PH3 MFC set to  0.000000
3/20/2012	2:06:08 AM	SiCl4 MFC set to  0.000000
3/20/2012	2:06:08 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	2:06:08 AM	Tube furnace set to 0
3/20/2012	3:06:08 AM	Run finished at 3:06 AM
3/20/2012	10:47:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/20/2012	10:47:39 AM	Recipe started at 10:47 AM
3/20/2012	10:47:39 AM	Helium valve closed
3/20/2012	10:47:39 AM	H2 valve closed
3/20/2012	10:47:39 AM	BCl3 valve closed
3/20/2012	10:47:39 AM	PH3 valve closed
3/20/2012	10:47:39 AM	SiCl4 pre valve closed
3/20/2012	10:47:39 AM	SiCl4 post valve closed
3/20/2012	10:47:39 AM	Main Vac valve closed
3/20/2012	10:47:39 AM	Bypass valve closed
3/20/2012	10:47:39 AM	Bubbler valve closed
3/20/2012	10:47:39 AM	Helium MFC set to  0.000000
3/20/2012	10:47:39 AM	H2 MFC set to  0.000000
3/20/2012	10:47:39 AM	BCl3 MFC set to  0.000000
3/20/2012	10:47:39 AM	PH3 MFC set to  0.000000
3/20/2012	10:47:39 AM	SiCl4 MFC set to  0.000000
3/20/2012	10:47:39 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	10:47:39 AM	Tube furnace set to 0
3/20/2012	10:47:42 AM	H2 valve closed
3/20/2012	10:47:42 AM	BCl3 valve closed
3/20/2012	10:47:42 AM	PH3 valve closed
3/20/2012	10:47:42 AM	SiCl4 pre valve closed
3/20/2012	10:47:42 AM	SiCl4 post valve closed
3/20/2012	10:47:42 AM	Main Vac valve closed
3/20/2012	10:47:42 AM	Bypass valve closed
3/20/2012	10:47:42 AM	Bubbler valve closed
3/20/2012	10:47:42 AM	Helium valve opened
3/20/2012	10:47:42 AM	Helium MFC set to  500.000000
3/20/2012	10:47:42 AM	H2 MFC set to  0.000000
3/20/2012	10:47:42 AM	BCl3 MFC set to  0.000000
3/20/2012	10:47:42 AM	PH3 MFC set to  0.000000
3/20/2012	10:47:42 AM	SiCl4 MFC set to  0.000000
3/20/2012	10:47:42 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	10:47:42 AM	Tube furnace set to 0
3/20/2012	10:48:48 AM	Helium valve closed
3/20/2012	10:48:48 AM	H2 valve closed
3/20/2012	10:48:48 AM	BCl3 valve closed
3/20/2012	10:48:48 AM	PH3 valve closed
3/20/2012	10:48:48 AM	SiCl4 pre valve closed
3/20/2012	10:48:48 AM	SiCl4 post valve closed
3/20/2012	10:48:48 AM	Main Vac valve closed
3/20/2012	10:48:48 AM	Bypass valve closed
3/20/2012	10:48:48 AM	Bubbler valve closed
3/20/2012	10:48:48 AM	Helium MFC set to  0.000000
3/20/2012	10:48:48 AM	H2 MFC set to  0.000000
3/20/2012	10:48:48 AM	BCl3 MFC set to  0.000000
3/20/2012	10:48:48 AM	PH3 MFC set to  0.000000
3/20/2012	10:48:48 AM	SiCl4 MFC set to  0.000000
3/20/2012	10:48:48 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	10:48:48 AM	Tube furnace set to 0
3/20/2012	10:48:49 AM	Run finished at 10:48 AM
3/20/2012	10:48:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/20/2012	10:52:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/20/2012	10:52:29 AM	Recipe started at 10:52 AM
3/20/2012	10:52:29 AM	Helium valve closed
3/20/2012	10:52:29 AM	H2 valve closed
3/20/2012	10:52:29 AM	BCl3 valve closed
3/20/2012	10:52:29 AM	PH3 valve closed
3/20/2012	10:52:29 AM	SiCl4 pre valve closed
3/20/2012	10:52:29 AM	SiCl4 post valve closed
3/20/2012	10:52:29 AM	Main Vac valve closed
3/20/2012	10:52:29 AM	Bubbler valve closed
3/20/2012	10:52:29 AM	Bypass valve opened
3/20/2012	10:52:29 AM	Helium MFC set to  0.000000
3/20/2012	10:52:29 AM	H2 MFC set to  0.000000
3/20/2012	10:52:29 AM	BCl3 MFC set to  0.000000
3/20/2012	10:52:29 AM	PH3 MFC set to  0.000000
3/20/2012	10:52:29 AM	SiCl4 MFC set to  0.000000
3/20/2012	10:52:29 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	10:52:29 AM	Tube furnace set to 0
3/20/2012	10:53:32 AM	Helium valve closed
3/20/2012	10:53:32 AM	H2 valve closed
3/20/2012	10:53:32 AM	BCl3 valve closed
3/20/2012	10:53:32 AM	PH3 valve closed
3/20/2012	10:53:32 AM	SiCl4 pre valve closed
3/20/2012	10:53:32 AM	SiCl4 post valve closed
3/20/2012	10:53:32 AM	Main Vac valve closed
3/20/2012	10:53:32 AM	Bubbler valve closed
3/20/2012	10:53:32 AM	Bypass valve opened
3/20/2012	10:53:32 AM	Helium MFC set to  0.000000
3/20/2012	10:53:32 AM	H2 MFC set to  0.000000
3/20/2012	10:53:32 AM	BCl3 MFC set to  0.000000
3/20/2012	10:53:32 AM	PH3 MFC set to  0.000000
3/20/2012	10:53:32 AM	SiCl4 MFC set to  0.000000
3/20/2012	10:53:32 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	10:53:32 AM	Tube furnace set to 0
3/20/2012	10:54:32 AM	Helium valve closed
3/20/2012	10:54:32 AM	H2 valve closed
3/20/2012	10:54:32 AM	BCl3 valve closed
3/20/2012	10:54:32 AM	PH3 valve closed
3/20/2012	10:54:32 AM	SiCl4 pre valve closed
3/20/2012	10:54:32 AM	SiCl4 post valve closed
3/20/2012	10:54:32 AM	Bypass valve closed
3/20/2012	10:54:32 AM	Bubbler valve closed
3/20/2012	10:54:32 AM	Main Vac valve opened
3/20/2012	10:54:32 AM	Helium MFC set to  0.000000
3/20/2012	10:54:32 AM	H2 MFC set to  0.000000
3/20/2012	10:54:32 AM	BCl3 MFC set to  0.000000
3/20/2012	10:54:32 AM	PH3 MFC set to  0.000000
3/20/2012	10:54:32 AM	SiCl4 MFC set to  0.000000
3/20/2012	10:54:32 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	10:54:32 AM	Tube furnace set to 0
3/20/2012	10:54:33 AM	Run finished at 10:54 AM
3/20/2012	10:54:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/20/2012	10:54:44 AM	Recipe started at 10:54 AM
3/20/2012	10:54:44 AM	Helium valve closed
3/20/2012	10:54:44 AM	H2 valve closed
3/20/2012	10:54:44 AM	BCl3 valve closed
3/20/2012	10:54:44 AM	PH3 valve closed
3/20/2012	10:54:44 AM	SiCl4 pre valve closed
3/20/2012	10:54:44 AM	SiCl4 post valve closed
3/20/2012	10:54:44 AM	Bypass valve closed
3/20/2012	10:54:44 AM	Bubbler valve closed
3/20/2012	10:54:44 AM	Main Vac valve opened
3/20/2012	10:54:44 AM	Helium MFC set to  0.000000
3/20/2012	10:54:44 AM	H2 MFC set to  0.000000
3/20/2012	10:54:44 AM	BCl3 MFC set to  0.000000
3/20/2012	10:54:44 AM	PH3 MFC set to  0.000000
3/20/2012	10:54:44 AM	SiCl4 MFC set to  0.000000
3/20/2012	10:54:44 AM	Bypass solenoid MFC set to  0.000000
3/20/2012	10:54:44 AM	Tube furnace set to 0
3/20/2012	12:54:44 PM	Helium valve closed
3/20/2012	12:54:44 PM	H2 valve closed
3/20/2012	12:54:44 PM	BCl3 valve closed
3/20/2012	12:54:44 PM	PH3 valve closed
3/20/2012	12:54:44 PM	SiCl4 pre valve closed
3/20/2012	12:54:44 PM	SiCl4 post valve closed
3/20/2012	12:54:44 PM	Main Vac valve closed
3/20/2012	12:54:44 PM	Bypass valve closed
3/20/2012	12:54:44 PM	Bubbler valve closed
3/20/2012	12:54:44 PM	Helium MFC set to  0.000000
3/20/2012	12:54:44 PM	H2 MFC set to  0.000000
3/20/2012	12:54:44 PM	BCl3 MFC set to  0.000000
3/20/2012	12:54:44 PM	PH3 MFC set to  0.000000
3/20/2012	12:54:44 PM	SiCl4 MFC set to  0.000000
3/20/2012	12:54:44 PM	Bypass solenoid MFC set to  0.000000
3/20/2012	12:54:44 PM	Tube furnace set to 0
3/20/2012	12:54:47 PM	Helium valve closed
3/20/2012	12:54:47 PM	BCl3 valve closed
3/20/2012	12:54:47 PM	PH3 valve closed
3/20/2012	12:54:47 PM	SiCl4 pre valve closed
3/20/2012	12:54:47 PM	SiCl4 post valve closed
3/20/2012	12:54:47 PM	Main Vac valve closed
3/20/2012	12:54:47 PM	Bypass valve closed
3/20/2012	12:54:47 PM	Bubbler valve closed
3/20/2012	12:54:47 PM	H2 valve opened
3/20/2012	12:54:47 PM	Helium MFC set to  0.000000
3/20/2012	12:54:47 PM	H2 MFC set to  500.000000
3/20/2012	12:54:47 PM	BCl3 MFC set to  0.000000
3/20/2012	12:54:47 PM	PH3 MFC set to  0.000000
3/20/2012	12:54:47 PM	SiCl4 MFC set to  0.000000
3/20/2012	12:54:47 PM	Bypass solenoid MFC set to  0.000000
3/20/2012	12:54:47 PM	Tube furnace set to 0
3/20/2012	12:55:55 PM	Helium valve closed
3/20/2012	12:55:55 PM	BCl3 valve closed
3/20/2012	12:55:55 PM	PH3 valve closed
3/20/2012	12:55:55 PM	SiCl4 pre valve closed
3/20/2012	12:55:55 PM	SiCl4 post valve closed
3/20/2012	12:55:55 PM	Main Vac valve closed
3/20/2012	12:55:55 PM	Bypass valve closed
3/20/2012	12:55:55 PM	H2 valve opened
3/20/2012	12:55:55 PM	Bubbler valve opened
3/20/2012	12:55:55 PM	Helium MFC set to  0.000000
3/20/2012	12:55:56 PM	H2 MFC set to  500.000000
3/20/2012	12:55:56 PM	BCl3 MFC set to  0.000000
3/20/2012	12:55:56 PM	PH3 MFC set to  0.000000
3/20/2012	12:55:56 PM	SiCl4 MFC set to  0.000000
3/20/2012	12:55:56 PM	Bypass solenoid MFC set to  0.000000
3/20/2012	12:55:56 PM	Tube furnace set to 0
3/20/2012	12:55:57 PM	Helium valve closed
3/20/2012	12:55:57 PM	BCl3 valve closed
3/20/2012	12:55:57 PM	PH3 valve closed
3/20/2012	12:55:57 PM	SiCl4 pre valve closed
3/20/2012	12:55:57 PM	SiCl4 post valve closed
3/20/2012	12:55:57 PM	Main Vac valve closed
3/20/2012	12:55:57 PM	Bypass valve closed
3/20/2012	12:55:57 PM	H2 valve opened
3/20/2012	12:55:57 PM	Bubbler valve opened
3/20/2012	12:55:57 PM	Helium MFC set to  0.000000
3/20/2012	12:55:57 PM	H2 MFC set to  500.000000
3/20/2012	12:55:57 PM	BCl3 MFC set to  0.000000
3/20/2012	12:55:57 PM	PH3 MFC set to  0.000000
3/20/2012	12:55:57 PM	SiCl4 MFC set to  0.000000
3/20/2012	12:55:57 PM	Bypass solenoid MFC set to  0.000000
3/20/2012	12:55:57 PM	Tube furnace set to 1000
3/20/2012	1:20:57 PM	Helium valve closed
3/20/2012	1:20:57 PM	PH3 valve closed
3/20/2012	1:20:57 PM	Main Vac valve closed
3/20/2012	1:20:57 PM	Bypass valve closed
3/20/2012	1:20:57 PM	H2 valve opened
3/20/2012	1:20:57 PM	BCl3 valve opened
3/20/2012	1:20:57 PM	SiCl4 pre valve opened
3/20/2012	1:20:57 PM	SiCl4 post valve opened
3/20/2012	1:20:57 PM	Bubbler valve opened
3/20/2012	1:20:57 PM	Helium MFC set to  0.000000
3/20/2012	1:20:57 PM	H2 MFC set to  450.000000
3/20/2012	1:20:57 PM	BCl3 MFC set to  1.500000
3/20/2012	1:20:57 PM	PH3 MFC set to  0.000000
3/20/2012	1:20:57 PM	SiCl4 MFC set to  50.000000
3/20/2012	1:20:57 PM	Bypass solenoid MFC set to  0.000000
3/20/2012	1:20:57 PM	Tube furnace set to 1000
3/20/2012	1:50:57 PM	Helium valve closed
3/20/2012	1:50:57 PM	BCl3 valve closed
3/20/2012	1:50:57 PM	PH3 valve closed
3/20/2012	1:50:57 PM	SiCl4 pre valve closed
3/20/2012	1:50:57 PM	SiCl4 post valve closed
3/20/2012	1:50:57 PM	Main Vac valve closed
3/20/2012	1:50:57 PM	Bypass valve closed
3/20/2012	1:50:57 PM	H2 valve opened
3/20/2012	1:50:57 PM	Bubbler valve opened
3/20/2012	1:50:57 PM	Helium MFC set to  0.000000
3/20/2012	1:50:57 PM	H2 MFC set to  500.000000
3/20/2012	1:50:57 PM	BCl3 MFC set to  0.000000
3/20/2012	1:50:57 PM	PH3 MFC set to  0.000000
3/20/2012	1:50:57 PM	SiCl4 MFC set to  0.000000
3/20/2012	1:50:57 PM	Bypass solenoid MFC set to  0.000000
3/20/2012	1:50:57 PM	Tube furnace set to 750
3/20/2012	2:05:57 PM	H2 valve closed
3/20/2012	2:05:57 PM	BCl3 valve closed
3/20/2012	2:05:57 PM	PH3 valve closed
3/20/2012	2:05:57 PM	SiCl4 pre valve closed
3/20/2012	2:05:57 PM	SiCl4 post valve closed
3/20/2012	2:05:57 PM	Main Vac valve closed
3/20/2012	2:05:57 PM	Bypass valve closed
3/20/2012	2:05:57 PM	Helium valve opened
3/20/2012	2:05:57 PM	Bubbler valve opened
3/20/2012	2:05:57 PM	Helium MFC set to  500.000000
3/20/2012	2:05:57 PM	H2 MFC set to  0.000000
3/20/2012	2:05:57 PM	BCl3 MFC set to  0.000000
3/20/2012	2:05:57 PM	PH3 MFC set to  0.000000
3/20/2012	2:05:57 PM	SiCl4 MFC set to  0.000000
3/20/2012	2:05:57 PM	Bypass solenoid MFC set to  0.000000
3/20/2012	2:05:57 PM	Tube furnace set to 0
3/20/2012	2:25:57 PM	Helium valve closed
3/20/2012	2:25:57 PM	H2 valve closed
3/20/2012	2:25:57 PM	BCl3 valve closed
3/20/2012	2:25:57 PM	PH3 valve closed
3/20/2012	2:25:57 PM	SiCl4 pre valve closed
3/20/2012	2:25:57 PM	SiCl4 post valve closed
3/20/2012	2:25:57 PM	Main Vac valve closed
3/20/2012	2:25:57 PM	Bypass valve closed
3/20/2012	2:25:57 PM	Bubbler valve closed
3/20/2012	2:25:58 PM	Helium MFC set to  0.000000
3/20/2012	2:25:58 PM	H2 MFC set to  0.000000
3/20/2012	2:25:58 PM	BCl3 MFC set to  0.000000
3/20/2012	2:25:58 PM	PH3 MFC set to  0.000000
3/20/2012	2:25:58 PM	SiCl4 MFC set to  0.000000
3/20/2012	2:25:58 PM	Bypass solenoid MFC set to  0.000000
3/20/2012	2:25:58 PM	Tube furnace set to 0
3/20/2012	2:45:58 PM	Helium valve closed
3/20/2012	2:45:58 PM	H2 valve closed
3/20/2012	2:45:58 PM	BCl3 valve closed
3/20/2012	2:45:58 PM	PH3 valve closed
3/20/2012	2:45:58 PM	SiCl4 pre valve closed
3/20/2012	2:45:58 PM	SiCl4 post valve closed
3/20/2012	2:45:58 PM	Main Vac valve closed
3/20/2012	2:45:58 PM	Bubbler valve closed
3/20/2012	2:45:58 PM	Bypass valve opened
3/20/2012	2:45:58 PM	Helium MFC set to  0.000000
3/20/2012	2:45:58 PM	H2 MFC set to  0.000000
3/20/2012	2:45:58 PM	BCl3 MFC set to  0.000000
3/20/2012	2:45:58 PM	PH3 MFC set to  0.000000
3/20/2012	2:45:58 PM	SiCl4 MFC set to  0.000000
3/20/2012	2:45:58 PM	Bypass solenoid MFC set to  0.000000
3/20/2012	2:45:58 PM	Tube furnace set to 0
3/20/2012	2:46:43 PM	Helium valve closed
3/20/2012	2:46:43 PM	H2 valve closed
3/20/2012	2:46:43 PM	BCl3 valve closed
3/20/2012	2:46:43 PM	PH3 valve closed
3/20/2012	2:46:43 PM	SiCl4 pre valve closed
3/20/2012	2:46:43 PM	SiCl4 post valve closed
3/20/2012	2:46:43 PM	Main Vac valve closed
3/20/2012	2:46:43 PM	Bubbler valve closed
3/20/2012	2:46:43 PM	Bypass valve opened
3/20/2012	2:46:43 PM	Helium MFC set to  0.000000
3/20/2012	2:46:43 PM	H2 MFC set to  0.000000
3/20/2012	2:46:43 PM	BCl3 MFC set to  0.000000
3/20/2012	2:46:43 PM	PH3 MFC set to  0.000000
3/20/2012	2:46:43 PM	SiCl4 MFC set to  0.000000
3/20/2012	2:46:43 PM	Bypass solenoid MFC set to  0.000000
3/20/2012	2:46:43 PM	Tube furnace set to 0
3/20/2012	2:47:43 PM	Helium valve closed
3/20/2012	2:47:43 PM	H2 valve closed
3/20/2012	2:47:43 PM	BCl3 valve closed
3/20/2012	2:47:43 PM	PH3 valve closed
3/20/2012	2:47:43 PM	SiCl4 pre valve closed
3/20/2012	2:47:43 PM	SiCl4 post valve closed
3/20/2012	2:47:43 PM	Bypass valve closed
3/20/2012	2:47:43 PM	Bubbler valve closed
3/20/2012	2:47:43 PM	Main Vac valve opened
3/20/2012	2:47:43 PM	Helium MFC set to  0.000000
3/20/2012	2:47:43 PM	H2 MFC set to  0.000000
3/20/2012	2:47:43 PM	BCl3 MFC set to  0.000000
3/20/2012	2:47:43 PM	PH3 MFC set to  0.000000
3/20/2012	2:47:43 PM	SiCl4 MFC set to  0.000000
3/20/2012	2:47:43 PM	Bypass solenoid MFC set to  0.000000
3/20/2012	2:47:44 PM	Tube furnace set to 0
3/20/2012	3:47:44 PM	Run finished at 3:47 PM
